DRIE Si Nanowire Arrays Supported Nano-Carbon Film for Deriving High Specific Energy Supercapacitors On-Chip

Supercapacitor is a promising solution to storage of pulsed energy generated by MEMS harvesting systems, relying on its faster charging/discharging capability than secondary battery. To improve the density on-chip supercapacitor which shows potential for integration with devices, in this paper we first present successful electrode design high specific pseudo-supercapacitors basis deep reactive ion etched Si nanowire array supported nano-carbon matrix. Widely used pseudo-capacitive manganese oxide active material facilely deposited into conductive matrix chemical bath deposition. The derived exhibits remarkable capacitance increase (around 4.5x enhancement) compared benefiting from contribution oxide. Assembled sandwich prototype supercapacitors symmetric configuration offer 741.6 mF cm−2 when discharged at 1 mA cm−2, and can attain as 51.5 μWh cm−2. achieved makes such attractive field collection cooperated micro-or nano-energy generators.